Si LSI manufacturing technology is essential as the foundation of modern society. However, there was no wafer-scale technology for rapid, non-destructive, and non-contact evaluation of the internal ...
A new terahertz technique reveals nanometer-scale PN junction depths in silicon chips, enabling faster, non-contact inspection for advanced semiconductor manufacturing. (Nanowerk News) Silicon ...
a, Schematic illustration of the buried channel transistor structure. b, THz emission from the PN junction. Ultrafast photocarrier transport due to the built-in electric field (drift current) ...
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