Abstract: As the feature size of advanced integrated circuits keeps shrinking, resolution enhancement techniques (RETs) are utilized to improve the printability in the lithography process. Optical ...
Abstract: This article presents a novel variable stiffness actuator (VSA) capable of wide-range stiffness regulation and has a compact structure. A cam-circular beam mechanism is proposed in the ...
President Donald Trump met with Ukrainian President Volodymyr Zelenskyy in Florida as both leaders work to make progress on a potential peace deal to end the war in ...
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