Double Patterning to the rescue (LELE, LFLE, SADP) - Part 1
13:55
YouTubenanolearning
Double Patterning to the rescue (LELE, LFLE, SADP) - Part 1
Introduction to Double Patterning which is used extensively for printing transistors and other features in front end of line (FEOL) flow in a semiconductor chip. This video also introduces the various processing options to achieve double patterning i.e. 1. Litho Etch Litho Etch (LELE) 2. Litho Freeze Litho Etch (LFLE) 3. Self Aligned Double ...
114.6K viewsAug 15, 2012
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Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation
Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation
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